Course syllabus
Course-PM
MKM110 Microsystems technology lp2 HT19 (7.5 hp)
Course is offered by the department of Microtechnology and Nanoscience
Contact details
Course examiner: Professor Peter Enoksson
Email: peter.enoksson@chalmers.se
Telephone: 031-772 18 68
Guest lectures: Cristina Rusu, ACREO AB
Anders Lundgren, SiTek
Course purpose
Objectives of the course
Microsystem technology is an interdisciplinary field dealing with miniaturized systems fabricated using micromachining technology. Application areas can be as diverse as from automotive- and IT-systems to the field of biomedicine.
The aim of the course is to educate engineers that at the end of the course can demonstrate 1) applicable knowledge of the function of modern silicon based microsensors, microactuators and microsystems along with 2) an ability to suggest sensible fabrication schemes for the realization of such devices. The course will result in an understanding of various measurement principles for non-electrical quantities as well as an understanding of the potential and limitations of miniaturization from a systems/application perspective. You will obtain insights in the microfabrication of sensors and actuators through a project work that runs during the course, including a literature survey and evaluation of microstructures. After completing the course you should be able to critically and constructively discuss all aspects of microsystems, from applications to fabrication, with professionals in the field.
Schedule
Course literature
Suggested textbooks in the field:
Introductory MEMS, Fabrication and Applications
T. M. Adams, R. A. Layton
Springer, ISBN: 978-0-387-09510-3
Microsensors MEMS and Smart Devices
Julien W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
John Wiley & Sons, LTD, ISBN: 978-0-471-86109-6
Other written information will be distributed during the course
Course design
The lecture series is given from a systems perspective and concrete applications are provided where various components such as sensors and miniaturised microsystems are needed. Physical effects and principles used in realizing sensors and microsystems are reviewed along with state-of-the-art fabrication techniques (i.e. micromachining and microelectronic fabrication). Measurement techniques for quantifying position, tension, acceleration, temperature, pressure, and flow will be described. Various micromechanical sensors and actuators are illustrated along with how these are used in various applications (i.e. IT-systems, medical systems, automotive systems, et c.).
A project performed in groups concern the design, operational principles, fabrication and relation to state-of-the-art of the group’s own device concept.
Demonstrations deal with FEM-modelling of devices, some critical fabrication steps of a micromechanical sensor and electrical evaluation.
Guest lecturers from the industry describe commercialized micromechanical sensors and give insight into how microsystems can be commercialized.
Lectures, 30 hours
Blocks: Introduction, Fabrication, Principles and Applications
- Introduction, microsystem technology and applications, an overview
- Fabrication technologies, lab security
- Physical principles for sensors and scaling phenomena
- Resonator systems
- Inertial sensors, automotive applications
- Microfluidics, flow sensors, flow control, pressure sensors
- Biotechnology and medical microsystems
- MOEMS, microoptical sensors and micro-optics
- RF-MEMS
Project, 80 hours
Each student group of four students will choose a sensor or actuator concept for their project and literature survey.
Outline of the project:
- Choose and defend a device concept
- Suggest a process plan for the fabrication of the device
- Compare the device with results from literature
- Oral presentation and written report
Demonstrations, 12 hours +preparation
There are three tutorials/demonstrations in the course:
- COMSOL tutorial of simulation software
- Clean room demonstration of fabrication techniques
- Demonstration of electrical measurements of sensor response
In the first tutorial the COMSOL software will be introduced and you will get to know how to use it to model microelectromechanical devices. During the clean room demonstration each group will follow the fabrication (in part) of two specific pre-designed micromechanical sensors (pressure sensor and flow sensor) in the MC2 process laboratory. The fabrication will be presented by a skilled supervisor and will be demonstrated using a multi project wafer (MPW, all devices are made on the same wafer). The goal with the third demonstration is to give you experience in performing practical measurements on real devices.
MC2, cleanroom:
- Totally 1230 m2 class 10-1000
- Silicon, III-Vs, nanostructures, liquid crystals,..
- For silicon: 150 mm processing line
- Electron beam lithography system
- Electron beam lithography system operator room
- Metrology Module
- Diffusion Module – Silicon
- Liquid Crystal Module
- Thin film Module
- Wet processing Module
- Optical lithography Module
- Thin film Module II
Changes made since the last occasion
Lecture dates and contents have been slightly modified based on lecturer availability.
Learning objectives and syllabus
Learning objectives:
- explain when and why modern silicon based microsystems are useful Examined: written exam
- describe the basic principles of silicon based microfabrication Examined: written exam
- draw simple mask layouts and design process plans for the fabrication (in clean-room) of microstructures and conclude what the resulting structures should look like Examined: written exam
- describe the function of a wide range of microdevices Examined: written exam
- consider and evaluate effects of miniaturization for (transducer) device functionality Examined: written exam
- discuss microdevice design and fabrication considerations Examined: project meetings, written exam
- critically scrutinize results from electrical measurements on microstructures Examined: written exam
- present project results in a scientific way in written and oral form Examined: project report and presentation
Link to the syllabus on Studieportalen.
If the course is a joint course (Chalmers and Göteborgs Universitet) you should link to both syllabus (Chalmers and Göteborgs Universitet).
Examination form
The course consists of two parts in the form of a lecture series and a project work done by groups of up to four students each. The final grade for each student is determined from the results of the mandatory written exam, the written report and oral presentation of the project work. The particular area of microsystem technology is determined depending on the student’s background and interests.
Course summary:
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